上海Automatic laser slotting / full cutting equipment
Model:Laser Grooving LFL-AB1200
Scope of application:Lowk wafer, Gan wafer, non low k wafer
Model:Laser Grooving LFL-AB1200
Scope of application:Lowk wafer, Gan wafer, non low k wafer
With the continuous improvement of chip integration, the linewidth is getting smaller and smaller, and RC delay and crosstalk noise have become prominent problems. When the linewidth required by the process is less than 65nm, lon-k layer with low dielectric constant must be used to solve the above problems. Because it is difficult to use ordinary diamond grinding wheel for cutting, sometimes it can not meet the processing standards required by electronic component manufacturers. Therefore, the engineers of Suzhou radium laser technology Co., Ltd. have developed processing application technology that can solve this problem.
01. Double cutting optical path
02. Cutting width 8-70 μ M continuously variable
03. Independently designed optical system
04. High productivity and stability
Laser power | ≥15W(Measured about 18W) | ||
Y-axis of linear motor | Stroke: 450mm | Stepping:1um | Resolution:1um |
X-axis of linear motor | Stroke: 650mm | Stepping:1um | Resolution:1um |
Z axis | Stroke: 20mm | Stepping:1um | Resolution:1um |
θ axis | Stroke: 270° | Stepping:0.001° | Resolution:0.001° |
Machining dimension | Maximum 12inch (300mm) | ||
Scribing mode | Full cut / surface grooving |
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